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最后更新：2022-11-17 14:13
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緊湊型氣體質(zhì)量流量計(jì)
FLEXI-FLOW Compact FF-M10 和 FF-M11緊湊型氣體質(zhì)量流量計(jì)適用于工作壓力在真空和17 bar(a)條件下精確測量0…500 mln/min 和 0…20 ln/min之間的流量。儀表結(jié)合基于毛細(xì)管MEMS技術(shù)快速穩(wěn)定的熱式質(zhì)量流量傳感器和可靠精確的旁路結(jié)構(gòu)。基于TCS技術(shù)，建立準(zhǔn)確的質(zhì)量流量測量，不受溫度和管路壓力變化影響。與集成溫度和上下游壓力傳感器相結(jié)合，22種氣體的嵌入式數(shù)據(jù)庫實(shí)現(xiàn)精準(zhǔn)集成轉(zhuǎn)換。多參數(shù)儀表可提供過程信息：
| Measurement / control system | |
|---|---|
| Flow range (intermediate ranges available) | min. 0…500 mln/min max. 0…20 ln/min (based on N2) |
| Pressure ranges | FF-M10: not available / FF-M11: 0…17 bar(a) |
| Accuracy (incl. linearity) (based on actual calibration) | Up to ±0.5% Rd plus ±0.1% FS (N2/Air/O2); for other gases add conversion uncertainty |
| Repeatability | Flow sensor: < ±0.2% Rd; Pressure sensors: < ±0.2% FS |
| Turndown ratio | up to 1:1000 |
| Max. operating pressure | 16 bar g |
| Multi Gas/Multi Range | embedded gas data for 22 unique gases plus any mixture of these gases |
| Response time (sensor) | < 30 ms (T63) |
| Long term stability | < 0.5% FS over period of 3 years; then < 0.2% FS per year |
| Mounting | any position, attitude sensitivity negligible |
| Temperature sensitivity | Flow sensor: zero 0.0015% FS/ºC; span 0.03% Rd/ºC; Pressure sensors: zero 0.16 mbar/ºC; span 0.05% Rd/ºC |
| Temperature accuracy | ± 0.2 ºC (instrument body temperature) |
| Accuracy pressure sensors | ±0.5% FS |
| Pressure sensitivity | standard: < 0.15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2 |
| Leak integrity, outboard | tested < 2 x 10-9 mbar l/s He |
| Mechanical parts | |
|---|---|
| Material (wetted parts) | aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass |
| Surface quality | < 1.6 mu Ra (<0.8 mu Ra for stainless steel body) |
| Pressure rating (PN) | 16 bar(g) / 250 psig |
| Process connections | optional: compression type, push-in or face seal couplings |
| Seals | default: FKM 51415; for other materials contact factory |
| Weight | 200 g with Aluminium body, 300 g with SS 316 body |
| Ingress protection | IP40 |
| Instrument body | Aluminium or Stainless steel (selectable) |
| Electrical properties | |
|---|---|
| Power supply | 24 Vdc ± 10% |
| Max. power consumption | 0.35 Watt |
| Digital communication | Modbus RTU or FLOW-BUS (selectable) |
| Support interface | USB-C port for easy setup; Optional Bluetooth connection for monitoring |
| Electrical connection | 9-pin D-sub (male) |
| Electrical connection | |
|---|---|
| CE | EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU |
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